Novel nano-scale absolute linear displacement measurement based on grating projection imaging

doi:10.1016/j.measurement.2021.109738

CIOMP OpenIR

	Novel nano-scale absolute linear displacement measurement based on grating projection imaging
	H. Yu; Q. Wan; Z. Mu; Y. Du and L. Liang
	2021
发表期刊	Measurement: Journal of the International Measurement Confederation
ISSN	2632241
卷号	182
摘要	There is urgent demand for new absolute Linear Displacement Measurement (LDM) technology with high resolution and high precision, during the development of high-end numerical control technology. In previous research, we found that displacement measurement based on the image processing method performs well, however, the volume increases when using an imaging lens, and the system is susceptible to factors such as virtual focus. In this paper, the lensless LDM image optical path is established based on grating projection imaging, then the absolute grating coding method is operated based on Msequence pseudo-random coding. A linear displacement subdivision algorithm is then deployed based on the digital image recognition algorithm. An LDM device with a measuring range of 250 mm was designed to test the performance of the proposed method. The device shows a measurement resolution of 1 nm and measurement accuracy of 1.76 m in the range of 250 mm. This work lays a foundation for further research on high performance LDM technology. 2021 Elsevier Ltd
DOI	10.1016/j.measurement.2021.109738
URL	查看原文
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65468
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H. Yu,Q. Wan,Z. Mu,et al. Novel nano-scale absolute linear displacement measurement based on grating projection imaging[J]. Measurement: Journal of the International Measurement Confederation,2021,182.
APA	H. Yu,Q. Wan,Z. Mu,&Y. Du and L. Liang.(2021).Novel nano-scale absolute linear displacement measurement based on grating projection imaging.Measurement: Journal of the International Measurement Confederation,182.
MLA	H. Yu,et al."Novel nano-scale absolute linear displacement measurement based on grating projection imaging".Measurement: Journal of the International Measurement Confederation 182(2021).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Novel nano-scale abs（2865KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载