Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition

doi:10.1116/6.0000816

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	Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition
	J. Chen; J. Wang; V. Saravade; I. T. Ferguson; W. Hu; Z. C. Feng and L. Wan
	2021
发表期刊	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
ISSN	7342101
卷号	39 期号:2
摘要	Optical and material properties of nickel-doped zinc oxide (ZnO-Ni) grown by metalorganic chemical vapor deposition with varying Ni source flow rates are investigated. ZnO-Ni showed a good crystal quality with (002) orientation but deteriorated at high Ni source flow rates. Photoluminescence responses show a reduction in the bandgap of ZnO-Ni with an increase in the Ni source flow and also with an increase in the temperature. Ni-doping can enhance luminescences at low concentrations ( 2021 Author(s).
DOI	10.1116/6.0000816
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65448
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	J. Chen,J. Wang,V. Saravade,et al. Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,2021,39(2).
APA	J. Chen,J. Wang,V. Saravade,I. T. Ferguson,W. Hu,&Z. C. Feng and L. Wan.(2021).Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition.Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,39(2).
MLA	J. Chen,et al."Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition".Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 39.2(2021).

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