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Micro-stress bonding analysis of high precision and lightweight mirrors
S. Tan; X. Yu; Y. Xu; Y. Xu and P. Jia
2021
发表期刊Optics Express
ISSN10944087
卷号29期号:21页码:33665-33678
摘要We propose analysis methods for mirror bonding. The functional relationship between the shrinkage of the adhesive layer and the shape accuracy of the mirror is established numerically. By designing the structural form of the optical mounting and setting an appropriate stiffness ratio between the mirror and bonding position of the optical mounting, the theoretical surface shape accuracy change can be determined. Accordingly, the mirror is bonded, and the surface shape accuracy of the mirror after bonding is found to be 0.020. This approach is useful in mirror design applications that require rapid preparation and accuracy control. 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.
DOI10.1364/OE.435527
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收录类别SCI ; EI
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文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/65419
专题中国科学院长春光学精密机械与物理研究所
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S. Tan,X. Yu,Y. Xu,et al. Micro-stress bonding analysis of high precision and lightweight mirrors[J]. Optics Express,2021,29(21):33665-33678.
APA S. Tan,X. Yu,Y. Xu,&Y. Xu and P. Jia.(2021).Micro-stress bonding analysis of high precision and lightweight mirrors.Optics Express,29(21),33665-33678.
MLA S. Tan,et al."Micro-stress bonding analysis of high precision and lightweight mirrors".Optics Express 29.21(2021):33665-33678.
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