Influence of alignment error on DMD super-resolution imaging optical system

doi:10.37188/CO.2020-0220

CIOMP OpenIR

	Influence of alignment error on DMD super-resolution imaging optical system
	S.-Y. Xing; C. Wang; M. Xu; Y.-C. Li; H.-D. Shi; Z. Liu and Q. Fu
	2021
发表期刊	Chinese Optics
ISSN	20951531
卷号	14 期号:5 页码:1194-1201
摘要	At present, most of the research on super-resolution imaging technology is focused on the super-resolution reconstruction algorithm, but the influence of the alignment error of an optical system on the super-resolution imaging results has not been reported. To solve this problem, We researche the influence of alignment error on super-resolution imaging. First, the basic imaging model of super-resolution imaging optical system based on Digital Micro-mirror Device (DMD) is established. A DMD super-resolution imaging optical system with operating band of 8~12 m is designed, and a method used to analyze the influence of the alignment error on super-resolution imaging quality is proposed. In the imaging model, alignment errors such as eccentricity, tilt, lens spacing error and defocus are introduced, and the reconstruction results are analyzed. Finally, the range of tolerance of the super-resolution imaging optical system is obtained. The results show that the total eccentricity error in the X direction is controlled within 0.07 mm, and that in the Y direction is within 0.05 mm; the total tilt error in the X and Y directions is controlled within 0.06; the overall lens spacing error is controlled within 0.02 mm; the defocusing amount of the imaging object lens is controlled within 0.04 mm; the defocusing amount of the projection objective lens is controlled within 0.05 mm, and within this range, the super-resolution imaging optical system can ensure the quality of super-resolution imaging. 2021, China Science Publishing & Media LTD. All right reserved.
DOI	10.37188/CO.2020-0220
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收录类别	EI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65337
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S.-Y. Xing,C. Wang,M. Xu,et al. Influence of alignment error on DMD super-resolution imaging optical system[J]. Chinese Optics,2021,14(5):1194-1201.
APA	S.-Y. Xing,C. Wang,M. Xu,Y.-C. Li,H.-D. Shi,&Z. Liu and Q. Fu.(2021).Influence of alignment error on DMD super-resolution imaging optical system.Chinese Optics,14(5),1194-1201.
MLA	S.-Y. Xing,et al."Influence of alignment error on DMD super-resolution imaging optical system".Chinese Optics 14.5(2021):1194-1201.

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