High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis

doi:10.1109/TIM.2021.3110323

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	High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis
	H. Tu; Y. Zheng; Y. Shan; Y. Chen; H. Zhang; P. Liu; H. Zhao; R. Zhang; S. Wang; J. Li; H. Yu; Y. Lee and L. Chen
	2021
发表期刊	IEEE Transactions on Instrumentation and Measurement
ISSN	189456
卷号	70
摘要	We constructed and investigated a high-speed broadband spectroscopic ellipsometric system with 12 polarization channels and a 2-D charge-coupled device. The system without any mechanically moving component completes the measurements of more than 10 000 polarization signals at 889 data points in a wavelength range of 400-800 nm within 150 ms, with a spectral resolution better than 1 nm. An integrated analyzer consisting of 12 subanalyzers was employed to obtain the light of different polarization states simultaneously. The spectral distribution of different polarization channels was acquired by the spectral data acquisition system in parallel mode. Two kinds of data processing methods were applied to analyze the light intensities of different channels to obtain the ellipsometric information and other physical parameters of the material over a broad spectral range. According to the analysis of measurement results of gold and silicon bulk, and tantalum pentoxide film, the reliability of the proposed instrument was verified, showing application prospects in the field where in situ spectral monitoring is required. 1963-2012 IEEE.
DOI	10.1109/TIM.2021.3110323
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65294
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H. Tu,Y. Zheng,Y. Shan,et al. High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis[J]. IEEE Transactions on Instrumentation and Measurement,2021,70.
APA	H. Tu.,Y. Zheng.,Y. Shan.,Y. Chen.,H. Zhang.,...&Y. Lee and L. Chen.(2021).High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis.IEEE Transactions on Instrumentation and Measurement,70.
MLA	H. Tu,et al."High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis".IEEE Transactions on Instrumentation and Measurement 70(2021).

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