High precision angular displacement measurement based on self-correcting error compensation of three image sensors

doi:10.1364/ao.446859

CIOMP OpenIR

	High precision angular displacement measurement based on self-correcting error compensation of three image sensors
	H. Yu; Q. H. Wan; X. R. Lu; C. H. Zhao and L. H. Liang
	2022
发表期刊	Applied Optics
ISSN	1559-128X
卷号	61 期号:1 页码:287-293
摘要	As the feedback link of a numerical control system, the measurement accuracy of absolute angular displacement measurements directly affects the control performance of a numerical control system. In previous research, angular displacement measurements based on dual image sensors can achieve higher measurement performance. However, the elimination of harmonic error by the dual image sensor is still limited. For this reason, this paper proposes an image-type angular displacement measurement method based on self-correction error compensation of three image sensors. First, the mathematical model of harmonic error is established, and the shortcomings of using dual image sensors to compensate the error are analyzed. Then, a high precision angular displacement measurement method based on three image sensors is proposed. Fmally, the self-correction error compensation method of three image sensors is applied to the angular displacement measurement system, and the measurement performance is verified. The experimental results show that a measurement accuracy of 1.76 '' can be achieved on the circular grating with a diameter of 96 mm. In contrast, the dual image sensor can only achieve a measurement accuracy of 2.88 ''. It is concluded that the odd number of image sensors can achieve higher measurement accuracy than the even number. This research lays a foundation for the realization of high precision image angular displacement measurement. (C) 2021 Optica Publishing Group
DOI	10.1364/ao.446859
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收录类别	SCI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65284
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H. Yu,Q. H. Wan,X. R. Lu,et al. High precision angular displacement measurement based on self-correcting error compensation of three image sensors[J]. Applied Optics,2022,61(1):287-293.
APA	H. Yu,Q. H. Wan,X. R. Lu,&C. H. Zhao and L. H. Liang.(2022).High precision angular displacement measurement based on self-correcting error compensation of three image sensors.Applied Optics,61(1),287-293.
MLA	H. Yu,et al."High precision angular displacement measurement based on self-correcting error compensation of three image sensors".Applied Optics 61.1(2022):287-293.

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