Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam

doi:10.1364/OE.433244

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	Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam
	Y. Yin; Z. Liu; S. Jiang; W. Wang; H. Yu and L. W
	2021
发表期刊	Optics Express
ISSN	10944087
卷号	29 期号:15 页码:24169-24181
摘要	We propose a new symmetrical heterodyne grating displacement measurement method, based on 2D grating and single diffraction quadruple subdivision method. Using a dual-frequency laser with a wavelength of 632.8 nm, output power of 2.2mW, and a 1200 l/mm 2D grating, eight diffracted light beams interfere in pairs in the X and Y directions through a turning element. The detection system s measurement accuracy was assessed experimentally. The system measurement resolution in the X and Y directions is better than 3 nm; the grating displacement measurement errors within a 10mm range are better than 30 nm and 40 nm, and the repeatability error is better than 25 nm. The method is not only applicable to nanoscale 2D displacement measurement technology but also can be used for ultra-precision positioning and ultra-precision processing, with the potential for picometer-level improvement. 2021 OSA - The Optical Society. All rights reserved.
DOI	10.1364/OE.433244
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65278
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Yin,Z. Liu,S. Jiang,et al. Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam[J]. Optics Express,2021,29(15):24169-24181.
APA	Y. Yin,Z. Liu,S. Jiang,W. Wang,&H. Yu and L. W.(2021).Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam.Optics Express,29(15),24169-24181.
MLA	Y. Yin,et al."Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam".Optics Express 29.15(2021):24169-24181.

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