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Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam
Y. Yin; Z. Liu; S. Jiang; W. Wang; H. Yu and L. W
2021
发表期刊Optics Express
ISSN10944087
卷号29期号:15页码:24169-24181
摘要We propose a new symmetrical heterodyne grating displacement measurement method, based on 2D grating and single diffraction quadruple subdivision method. Using a dual-frequency laser with a wavelength of 632.8 nm, output power of 2.2mW, and a 1200 l/mm 2D grating, eight diffracted light beams interfere in pairs in the X and Y directions through a turning element. The detection system s measurement accuracy was assessed experimentally. The system measurement resolution in the X and Y directions is better than 3 nm; the grating displacement measurement errors within a 10mm range are better than 30 nm and 40 nm, and the repeatability error is better than 25 nm. The method is not only applicable to nanoscale 2D displacement measurement technology but also can be used for ultra-precision positioning and ultra-precision processing, with the potential for picometer-level improvement. 2021 OSA - The Optical Society. All rights reserved.
DOI10.1364/OE.433244
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收录类别SCI ; EI
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文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/65278
专题中国科学院长春光学精密机械与物理研究所
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Y. Yin,Z. Liu,S. Jiang,et al. Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam[J]. Optics Express,2021,29(15):24169-24181.
APA Y. Yin,Z. Liu,S. Jiang,W. Wang,&H. Yu and L. W.(2021).Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam.Optics Express,29(15),24169-24181.
MLA Y. Yin,et al."Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam".Optics Express 29.15(2021):24169-24181.
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