Echelle gratings tiling method based on lateral shearing interferometry

doi:10.1016/j.optlastec.2021.107475

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	Echelle gratings tiling method based on lateral shearing interferometry
	Y. F. Li; X. T. Mi; X. D. Qi; S. W. Zhang; G. J. Yang; H. Z. Yu; X. T. Li and W. H. Li
	2022
发表期刊	Optics and Laser Technology
ISSN	0030-3992
卷号	145 期号:7
摘要	A method for echelle gratings tiling based on lateral shearing interferometry is proposed. Fringe patterns of the grating assembly are generated by a wedge plate. Mosaic errors can be calculated and corrected by observing the working order and its adjacent order. An experimental mosaic of two 50 mm x 50 mm, 79 grooves/mm echelles is aligned to verify the theory. The rms wavefront is better than 0.04 wavelength. Angular and translation sensitivities of less than 1 arcsec and 10 nm are achieved respectively.
DOI	10.1016/j.optlastec.2021.107475
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收录类别	SCI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65190
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. F. Li,X. T. Mi,X. D. Qi,et al. Echelle gratings tiling method based on lateral shearing interferometry[J]. Optics and Laser Technology,2022,145(7).
APA	Y. F. Li.,X. T. Mi.,X. D. Qi.,S. W. Zhang.,G. J. Yang.,...&X. T. Li and W. H. Li.(2022).Echelle gratings tiling method based on lateral shearing interferometry.Optics and Laser Technology,145(7).
MLA	Y. F. Li,et al."Echelle gratings tiling method based on lateral shearing interferometry".Optics and Laser Technology 145.7(2022).

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