CIOMP OpenIR
Echelle gratings tiling method based on lateral shearing interferometry
Y. F. Li; X. T. Mi; X. D. Qi; S. W. Zhang; G. J. Yang; H. Z. Yu; X. T. Li and W. H. Li
2022
Source PublicationOptics and Laser Technology
ISSN0030-3992
Volume145Issue:7
AbstractA method for echelle gratings tiling based on lateral shearing interferometry is proposed. Fringe patterns of the grating assembly are generated by a wedge plate. Mosaic errors can be calculated and corrected by observing the working order and its adjacent order. An experimental mosaic of two 50 mm x 50 mm, 79 grooves/mm echelles is aligned to verify the theory. The rms wavefront is better than 0.04 wavelength. Angular and translation sensitivities of less than 1 arcsec and 10 nm are achieved respectively.
DOI10.1016/j.optlastec.2021.107475
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Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/65190
Collection中国科学院长春光学精密机械与物理研究所
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GB/T 7714
Y. F. Li,X. T. Mi,X. D. Qi,et al. Echelle gratings tiling method based on lateral shearing interferometry[J]. Optics and Laser Technology,2022,145(7).
APA Y. F. Li.,X. T. Mi.,X. D. Qi.,S. W. Zhang.,G. J. Yang.,...&X. T. Li and W. H. Li.(2022).Echelle gratings tiling method based on lateral shearing interferometry.Optics and Laser Technology,145(7).
MLA Y. F. Li,et al."Echelle gratings tiling method based on lateral shearing interferometry".Optics and Laser Technology 145.7(2022).
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