CIOMP OpenIR
Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor
J. Tao; Z. Z. Liang; G. Zeng; D. J. Meng; D. R. Smith; Q. H. Liu; Q. R. Yang; M. L. Zhang; W. Pang; J. Q. Liang and T. Bourouina
2021
发表期刊Nanophotonics
ISSN2192-8606
卷号10期号:4页码:1337-1346
摘要Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity. An optimized ultrathin multilayer stack was implemented to realize the proposed device. It is experimentally demonstrated that the resonance frequency of the FBAR can be used efficiently as a sensor output as it downshifts linearly with the intensity of the incident infrared irradiation. The resulting sensor also achieves a high absorption of 88% for an infrared spectrum centered at a wavelength of 8.2 mu m. The structure is compact and can be easily integrated on a CMOS-compatible chip since both the FBAR and PMA utilize and share the same stack of metal and dielectric layers.
DOI10.1515/nanoph-2020-0607
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收录类别SCI ; EI
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文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/65181
专题中国科学院长春光学精密机械与物理研究所
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J. Tao,Z. Z. Liang,G. Zeng,et al. Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor[J]. Nanophotonics,2021,10(4):1337-1346.
APA J. Tao.,Z. Z. Liang.,G. Zeng.,D. J. Meng.,D. R. Smith.,...&J. Q. Liang and T. Bourouina.(2021).Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor.Nanophotonics,10(4),1337-1346.
MLA J. Tao,et al."Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor".Nanophotonics 10.4(2021):1337-1346.
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