Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor

doi:10.1515/nanoph-2020-0607

CIOMP OpenIR

	Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor
	J. Tao; Z. Z. Liang; G. Zeng; D. J. Meng; D. R. Smith; Q. H. Liu; Q. R. Yang; M. L. Zhang; W. Pang; J. Q. Liang and T. Bourouina
	2021
Source Publication	Nanophotonics
ISSN	2192-8606
Volume	10 Issue:4 Pages:1337-1346
Abstract	Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity. An optimized ultrathin multilayer stack was implemented to realize the proposed device. It is experimentally demonstrated that the resonance frequency of the FBAR can be used efficiently as a sensor output as it downshifts linearly with the intensity of the incident infrared irradiation. The resulting sensor also achieves a high absorption of 88% for an infrared spectrum centered at a wavelength of 8.2 mu m. The structure is compact and can be easily integrated on a CMOS-compatible chip since both the FBAR and PMA utilize and share the same stack of metal and dielectric layers.
DOI	10.1515/nanoph-2020-0607
URL	查看原文
Indexed By	SCI ; EI
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Document Type	期刊论文
Identifier	http://ir.ciomp.ac.cn/handle/181722/65181
Collection	中国科学院长春光学精密机械与物理研究所
Recommended Citation GB/T 7714	J. Tao,Z. Z. Liang,G. Zeng,et al. Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor[J]. Nanophotonics,2021,10(4):1337-1346.
APA	J. Tao.,Z. Z. Liang.,G. Zeng.,D. J. Meng.,D. R. Smith.,...&J. Q. Liang and T. Bourouina.(2021).Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor.Nanophotonics,10(4),1337-1346.
MLA	J. Tao,et al."Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor".Nanophotonics 10.4(2021):1337-1346.

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中国科学院长春光学精密机械与物理研究所