Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor

doi:10.1515/nanoph-2020-0607

CIOMP OpenIR

	Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor
	J. Tao; Z. Z. Liang; G. Zeng; D. J. Meng; D. R. Smith; Q. H. Liu; Q. R. Yang; M. L. Zhang; W. Pang; J. Q. Liang and T. Bourouina
	2021
发表期刊	Nanophotonics
ISSN	2192-8606
卷号	10 期号:4 页码:1337-1346
摘要	Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity. An optimized ultrathin multilayer stack was implemented to realize the proposed device. It is experimentally demonstrated that the resonance frequency of the FBAR can be used efficiently as a sensor output as it downshifts linearly with the intensity of the incident infrared irradiation. The resulting sensor also achieves a high absorption of 88% for an infrared spectrum centered at a wavelength of 8.2 mu m. The structure is compact and can be easily integrated on a CMOS-compatible chip since both the FBAR and PMA utilize and share the same stack of metal and dielectric layers.
DOI	10.1515/nanoph-2020-0607
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65181
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	J. Tao,Z. Z. Liang,G. Zeng,et al. Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor[J]. Nanophotonics,2021,10(4):1337-1346.
APA	J. Tao.,Z. Z. Liang.,G. Zeng.,D. J. Meng.,D. R. Smith.,...&J. Q. Liang and T. Bourouina.(2021).Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor.Nanophotonics,10(4),1337-1346.
MLA	J. Tao,et al."Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor".Nanophotonics 10.4(2021):1337-1346.

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