Design of off-axis multi-reflective optical system based on particle swarm optimization

doi:10.37188/CO.2021-0087

CIOMP OpenIR

	Design of off-axis multi-reflective optical system based on particle swarm optimization
	Y. Wu; L.-P. Wang; J. Yu; X. Zhang and C.-S. Jin
	2021
发表期刊	Chinese Optics
ISSN	20951531
卷号	14 期号:6 页码:1435-1450
摘要	An initial construction satisfying aberration balance and multi-constraint control is essential for the design of an off-axis multi-reflective optical system with minimal aberration. In this paper, a mathematical model for calculating the initial structure of off-axis multi-reflective is established based on the grouping design method combining spatial ray tracing and aberration correction, and an improved Particle Swarm Optimization (PSO) is proposed to solve the initial structure problem of an off-axis multi-reflective optical system. The PSO of natural selection with shrinkage factor is applied to improve calculation accuracy and design efficiency, so as to obtain the initial structure of the off-axis multi-reflection optical system. In the last part of this paper, taking an Extreme UltraViolet (EUV) lithography projection objective with six-mirror reflective aspheric mirrors as an example, the reliability and effectiveness of this method are verified. A 0.33 numerical aperture EUV lithographic objective with wave-front error better than 1/80 (=13.5 nm) RMS is achieved. 2021, China Science Publishing & Media LTD. All right reserved.
DOI	10.37188/CO.2021-0087
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收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65161
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Wu,L.-P. Wang,J. Yu,et al. Design of off-axis multi-reflective optical system based on particle swarm optimization[J]. Chinese Optics,2021,14(6):1435-1450.
APA	Y. Wu,L.-P. Wang,J. Yu,&X. Zhang and C.-S. Jin.(2021).Design of off-axis multi-reflective optical system based on particle swarm optimization.Chinese Optics,14(6),1435-1450.
MLA	Y. Wu,et al."Design of off-axis multi-reflective optical system based on particle swarm optimization".Chinese Optics 14.6(2021):1435-1450.

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