Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices

doi:10.3390/ma14216437

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	Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices
	Q. Z. Zhang; M. Z. Chen; H. L. Liu; X. Y. Zhao; X. M. Qin; F. F. Wang; Y. X. Tang; K. H. Yeoh; K. H. Chew and X. J. Sun
	2021
发表期刊	Materials
卷号	14 期号:21 页码:11
摘要	In this work, we systematically studied the deposition, characterization, and crystal structure modeling of ScAlN thin film. Measurements of the piezoelectric device's relevant material properties, such as crystal structure, crystallographic orientation, and piezoelectric response, were performed to characterize the Sc0.29Al0.71N thin film grown using pulsed DC magnetron sputtering. Crystal structure modeling of the ScAlN thin film is proposed and validated, and the structure-property relations are discussed. The investigation results indicated that the sputtered thin film using seed layer technique had a good crystalline quality and a clear grain boundary. In addition, the effective piezoelectric coefficient d(33) was up to 12.6 pC/N, and there was no wurtzite-to-rocksalt phase transition under high pressure. These good features demonstrated that the sputtered ScAlN is promising for application in high-coupling piezoelectric devices with high-pressure stability.
DOI	10.3390/ma14216437
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收录类别	SCI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65135
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Q. Z. Zhang,M. Z. Chen,H. L. Liu,et al. Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices[J]. Materials,2021,14(21):11.
APA	Q. Z. Zhang.,M. Z. Chen.,H. L. Liu.,X. Y. Zhao.,X. M. Qin.,...&K. H. Chew and X. J. Sun.(2021).Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices.Materials,14(21),11.
MLA	Q. Z. Zhang,et al."Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices".Materials 14.21(2021):11.

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