A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment

doi:10.1016/j.ymssp.2020.107603

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	A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment
	P.-Z. Li; D.-F. Zhang; B. Lennox and F. Arvin
	2021
发表期刊	Mechanical Systems and Signal Processing
ISSN	8883270
卷号	155
摘要	In this paper, a novel 3-degree-of-freedom (DOF) nanopositioner was investigated in order to position objects with nanometer scale accuracy. Nanopositioners are used in a variety of real-world applications, e.g. biomedical technology and nanoassembly. In this work, a nanopositioner was firstly designed with the flexure diaphragm guider, capacitive sensors and walking piezoelectric actuators. The specifically designed monolithic flexure diaphragm guider was able to significantly restrict motions in the other unwanted directions. The walking piezoelectric actuator can enable the developed nanopositioner to have nanometer scale positioning accuracy and a large travel range. Then a closed-loop sliding mode control strategy was developed to overcome the effect of the actuator's speed nonlinearity and its stability was analysed based on Lyapunov theory. Finally, experiments focused on coupling displacement and point-to-point movement were conducted. The observed results revealed that the ratio of coupling displacement to Z displacement was less than 0.1%, which means that the coupling displacement was less than 120 nm during the Z direction travel range of the nanopositioner from 80 m to 80 m. Moreover, the positioning accuracy in the Z direction of point-to-point movement was within 10 nm and the dynamic response settled within 0.2 s. Therefore, the experimental results showed that the novel piezoelectric driven nanopositioner has excellent performance in terms of coupling displacement and nanometer scale accuracy for point-to-point movement. 2021 The Author(s)
DOI	10.1016/j.ymssp.2020.107603
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65012
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	P.-Z. Li,D.-F. Zhang,B. Lennox and F. Arvin. A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment[J]. Mechanical Systems and Signal Processing,2021,155.
APA	P.-Z. Li,D.-F. Zhang,&B. Lennox and F. Arvin.(2021).A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment.Mechanical Systems and Signal Processing,155.
MLA	P.-Z. Li,et al."A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment".Mechanical Systems and Signal Processing 155(2021).

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