Overview of 2D grating displacement measurement technology

doi:10.37188/CO.2020-0237

CIOMP OpenIR

	Overview of 2D grating displacement measurement technology
	Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao
	2020
发表期刊	Chinese Optics
ISSN	20951531
卷号	13 期号:6 页码:1224-1238
摘要	Ultra-precision displacement measurement technology is not only the basis of precision machining, but also plays a decisive role in the chip manufacturing industry that is rapidly developing in Moore's Law. The grating displacement measurement system based on the grating pitch is widely used in multidimensional measurement system. Compared with the laser displacement measurement system, grating displacement measurement system greatly reduces the environmental requirements for humidity, temperature and pressure. In this paper, the development status of the optical structure of displacement sensing system based on two-dimensional grating in recent years is introduced. The principles of zero-difference and heterodyne grating interferometrys are introduced. The optical structure based on single-block two-dimensional grating is reviewed. The development history of the optical structure in single-block two-dimensional grating to coupling designs of multi-block two-dimensional gratings is summarized, the advantages and disadvantages of several two-dimensional grating displacement measurement systems are compared and analyzed, and the development trend of two-dimensional grating displacement measurement system is prospected. The engineering process of two-dimensional grating displacement measurement system is summarized. Copyright 2020 Chinese Optics. All rights reserved.
DOI	10.37188/CO.2020-0237
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收录类别	EI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64775
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao. Overview of 2D grating displacement measurement technology[J]. Chinese Optics,2020,13(6):1224-1238.
APA	Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao.(2020).Overview of 2D grating displacement measurement technology.Chinese Optics,13(6),1224-1238.
MLA	Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao."Overview of 2D grating displacement measurement technology".Chinese Optics 13.6(2020):1224-1238.

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