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Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing
L. X. Li,X. C. Li,Q. Cheng,R. G. Li,W. J. Deng,X. Luo,F. Zhang,D. L. Xue and X. J. Zhang
2020
发表期刊Results in Physics
ISSN2211-3797
卷号19页码:10
摘要In computer-controlled optical surfacing (CCOS), the paths of the lap tools are limited inside the optical surface; this restricts convolution in the dwell-time algorithm and causes mid-spatial-frequency surface errors. An optimized strategy ensuring relatively complete convolution of the dwell-time algorithm is developed to control the mid-spatial-frequency surface error and simultaneously ensure high optical manufacturing efficiency. Different-sized lap tools are then introduced to correct the surface error in different areas of the optics. Simulations and experiments using a large off-axis SiC mirror demonstrate the validity of the strategy, and it could be widely applied to CCOS in grinding or polishing processes.
DOI10.1016/j.rinp.2020.103356
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收录类别SCI
语种英语
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文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/64771
专题中国科学院长春光学精密机械与物理研究所
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GB/T 7714
L. X. Li,X. C. Li,Q. Cheng,R. G. Li,W. J. Deng,X. Luo,F. Zhang,D. L. Xue and X. J. Zhang. Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing[J]. Results in Physics,2020,19:10.
APA L. X. Li,X. C. Li,Q. Cheng,R. G. Li,W. J. Deng,X. Luo,F. Zhang,D. L. Xue and X. J. Zhang.(2020).Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing.Results in Physics,19,10.
MLA L. X. Li,X. C. Li,Q. Cheng,R. G. Li,W. J. Deng,X. Luo,F. Zhang,D. L. Xue and X. J. Zhang."Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing".Results in Physics 19(2020):10.
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