A New Stitching Method for Dark-Field Surface Defects Inspection Based on Simplified Target-Tracking and Path Correction

doi:10.3390/s20020448

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	A New Stitching Method for Dark-Field Surface Defects Inspection Based on Simplified Target-Tracking and Path Correction
	X. Chen,J. Q. Li and Y. X. Sui
	2020
发表期刊	Sensors
卷号	20 期号:2 页码:19
摘要	A camera-based dark-field imaging system can effectively detect defects of microns on large optics by scanning and stitching sub-apertures with a small field of view. However, conventional stitching methods encounter problems of mismatches and location deviations, since few defects exist on the tested fine surface. In this paper, a highly efficient stitching method is proposed, based on a simplified target-tracking and adaptive scanning path correction. By increasing the number of sub-apertures and switching to camera perspective, the defects can be regarded as moving targets. A target-tracking procedure is firstly performed to obtain the marked targets. Then, the scanning path is corrected by minimizing the sum of deviations. The final stitching results are updated by re-using the target-tracking method. An experiment was carried out on an inspection of our specially designed testing sample. Subsequently, 118 defects were identified out of 120 truly existing defects, without stitching mismatches. The experiment results show that this method can help to reduce mismatches and location deviations of defects, and it was also effective in increasing the detectability for weak defects.
DOI	10.3390/s20020448
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64719
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Chen,J. Q. Li and Y. X. Sui. A New Stitching Method for Dark-Field Surface Defects Inspection Based on Simplified Target-Tracking and Path Correction[J]. Sensors,2020,20(2):19.
APA	X. Chen,J. Q. Li and Y. X. Sui.(2020).A New Stitching Method for Dark-Field Surface Defects Inspection Based on Simplified Target-Tracking and Path Correction.Sensors,20(2),19.
MLA	X. Chen,J. Q. Li and Y. X. Sui."A New Stitching Method for Dark-Field Surface Defects Inspection Based on Simplified Target-Tracking and Path Correction".Sensors 20.2(2020):19.

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