Mo/Si multilayers sputtered onto inclined substrates: experiments and simulations

doi:10.1364/oe.390216

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	Mo/Si multilayers sputtered onto inclined substrates: experiments and simulations
	S. Z. Sun,B. Yu,G. Tao,S. Yao,Y. Liu,W. Y. Deng,C. Li and C. S. Jin
	2020
发表期刊	Optics Express
ISSN	1094-4087
卷号	28 期号:9 页码:13516-13531
摘要	We performed experiments involving the fabrication of Mo/Si multilayer coatings and established a model of the deposition process. The surface and interface roughness, surface power spectral density, layer structures, and coating reflectivity were characterized for different substrate inclination angles. The surface and interface roughness increase and the coating reflectivity decreases with an increase in the substrate inclination angle, especially for large angles (50-70 degrees). The model was applied to explain this phenomenon, and a proposal to reduce the interfacial roughness caused by substrate inclination angles is presented. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
DOI	10.1364/oe.390216
URL	查看原文
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64690
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S. Z. Sun,B. Yu,G. Tao,S. Yao,Y. Liu,W. Y. Deng,C. Li and C. S. Jin. Mo/Si multilayers sputtered onto inclined substrates: experiments and simulations[J]. Optics Express,2020,28(9):13516-13531.
APA	S. Z. Sun,B. Yu,G. Tao,S. Yao,Y. Liu,W. Y. Deng,C. Li and C. S. Jin.(2020).Mo/Si multilayers sputtered onto inclined substrates: experiments and simulations.Optics Express,28(9),13516-13531.
MLA	S. Z. Sun,B. Yu,G. Tao,S. Yao,Y. Liu,W. Y. Deng,C. Li and C. S. Jin."Mo/Si multilayers sputtered onto inclined substrates: experiments and simulations".Optics Express 28.9(2020):13516-13531.

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