A mechanically bendable and conformally attachable polymer membrane microlaser array enabled by digital interference lithography

doi:10.1039/c9nr10970f

CIOMP OpenIR

	A mechanically bendable and conformally attachable polymer membrane microlaser array enabled by digital interference lithography
	W. B. Huang,X. J. Zhang,T. C. Yang,S. L. Wu,X. F. Yang,Y. H. Liu and L. S. Chen
	2020
发表期刊	Nanoscale
ISSN	2040-3364
卷号	12 期号:12 页码:6736-6743
摘要	The progressive miniaturization and thinning of photonic devices would enable the realization of multi-functional photonic integrated circuits and expand the application frontier to novel fields including wearable and disposable electronics. Herein, we have demonstrated a mechanically bendable and conformally attachable polymer membrane microcavity laser array using digital interference lithography. The developed lithography system could distribute a number of subwavelength grating pixels with both high efficiency (1k pixels per second) and excellent versatility (ease of control in the pixel size, spacing, and grating periodicity) as the microcavity laser array, in which a pair of subwavelength gratings constitutes a distributed Bragg resonator microcavity via coherent interference, furnishes a vertically emitting microcavity laser array for convenient light coupling and utilization. The microlaser array polymer membrane presented a total thickness of only 30 mu m with excellent performance stability and reliability against long time operation and harsh environmental conditions, which could be further reversibly stretched, repeatedly bendable and conformally attached onto rounded or irregular surfaces or biological tissues with no degradation in single-mode or low-threshold characteristics, paving a way for on-chip optical functionalization toward wearable electronics and outdoor environmental monitoring applications.
DOI	10.1039/c9nr10970f
URL	查看原文
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64668
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	W. B. Huang,X. J. Zhang,T. C. Yang,S. L. Wu,X. F. Yang,Y. H. Liu and L. S. Chen. A mechanically bendable and conformally attachable polymer membrane microlaser array enabled by digital interference lithography[J]. Nanoscale,2020,12(12):6736-6743.
APA	W. B. Huang,X. J. Zhang,T. C. Yang,S. L. Wu,X. F. Yang,Y. H. Liu and L. S. Chen.(2020).A mechanically bendable and conformally attachable polymer membrane microlaser array enabled by digital interference lithography.Nanoscale,12(12),6736-6743.
MLA	W. B. Huang,X. J. Zhang,T. C. Yang,S. L. Wu,X. F. Yang,Y. H. Liu and L. S. Chen."A mechanically bendable and conformally attachable polymer membrane microlaser array enabled by digital interference lithography".Nanoscale 12.12(2020):6736-6743.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
A mechanically benda（2124KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览请求全文