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Interferometric measurement of freeform surfaces using irregular subaperture stitching
Z. M. Zang,J. Bai,D. Liu,Y. L. Liu,Y. H. Zhou,T. Shi,L. Zhang,L. Miao and W. Huang
2020
发表期刊Measurement Science and Technology
ISSN0957-0233
卷号31期号:5页码:10
摘要Irregular subaperture stitching interferometry (ISSI) is proposed for non-null optical freeform surface testing. Compared with circular and annular subapertures, irregular subapertures have a better performance in matching the locally resolvable interferograms due to the rotational asymmetry of freeform surfaces. A modified multi-aperture simultaneous reverse optimization reconstruction algorithm is employed for the subaperture stitching, allowing not only non-complementary subapertures but also no subaperture overlaps. Numerical simulations with error analyses display the accuracy of our method. Experiments showing the effectiveness of the ISSI are presented by testing a phi 20 mm biconic surface with cross-validation.
DOI10.1088/1361-6501/ab3be3
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收录类别SCI ; EI
语种英语
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文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/64628
专题中国科学院长春光学精密机械与物理研究所
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GB/T 7714
Z. M. Zang,J. Bai,D. Liu,Y. L. Liu,Y. H. Zhou,T. Shi,L. Zhang,L. Miao and W. Huang. Interferometric measurement of freeform surfaces using irregular subaperture stitching[J]. Measurement Science and Technology,2020,31(5):10.
APA Z. M. Zang,J. Bai,D. Liu,Y. L. Liu,Y. H. Zhou,T. Shi,L. Zhang,L. Miao and W. Huang.(2020).Interferometric measurement of freeform surfaces using irregular subaperture stitching.Measurement Science and Technology,31(5),10.
MLA Z. M. Zang,J. Bai,D. Liu,Y. L. Liu,Y. H. Zhou,T. Shi,L. Zhang,L. Miao and W. Huang."Interferometric measurement of freeform surfaces using irregular subaperture stitching".Measurement Science and Technology 31.5(2020):10.
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