Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving

doi:doi：10.1007/s40684-020-00198-3

CIOMP OpenIR

	Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving
	S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan
	2020
发表期刊	International Journal of Precision Engineering and Manufacturing-Green Technology
ISSN	2288-6206
页码	14
摘要	Lubrication can improve the tool-workpiece interface condition in ultraprecision machining, especially in microgrooving processes. The aim of this study was to compare the effects of dry, liquid (cutting oil), solid (wax) and hybrid (cutting oil and wax) lubrication conditions, on the creation of arc-sectioned microgrooves on single-crystal silicon wafers using a single-crystal diamond tool. Micro cutting forces, chip morphology, and surface quality at different locations of the grooves were investigated. Rose-shaped continuous chips were observed in dry cutting, indicating stable ductile mode material removal. The entrance side of the groove was always smoother than the exit side with a higher degree of phase transformation. Chip adhesions on the tool edge were found in dry and oil lubricated cutting, whereas wax coating could prevent the adhesion. Wax coating played the dual roles of a chip breaker as well as a high-performance lubricant, thus improved the surface integrity. This study demonstrated the capability of using wax coating as an environmentally friendly solid lubricant for microgrooving of single-crystal silicon and possibly for other hard brittle materials.
DOI	doi：10.1007/s40684-020-00198-3
URL	查看原文
收录类别	SCI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64611
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan. Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving[J]. International Journal of Precision Engineering and Manufacturing-Green Technology,2020:14.
APA	S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan.(2020).Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving.International Journal of Precision Engineering and Manufacturing-Green Technology,14.
MLA	S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan."Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving".International Journal of Precision Engineering and Manufacturing-Green Technology (2020):14.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Kalkhoran-Influence （5099KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载