Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving | |
S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan | |
2020 | |
发表期刊 | International Journal of Precision Engineering and Manufacturing-Green Technology |
ISSN | 2288-6206 |
页码 | 14 |
摘要 | Lubrication can improve the tool-workpiece interface condition in ultraprecision machining, especially in microgrooving processes. The aim of this study was to compare the effects of dry, liquid (cutting oil), solid (wax) and hybrid (cutting oil and wax) lubrication conditions, on the creation of arc-sectioned microgrooves on single-crystal silicon wafers using a single-crystal diamond tool. Micro cutting forces, chip morphology, and surface quality at different locations of the grooves were investigated. Rose-shaped continuous chips were observed in dry cutting, indicating stable ductile mode material removal. The entrance side of the groove was always smoother than the exit side with a higher degree of phase transformation. Chip adhesions on the tool edge were found in dry and oil lubricated cutting, whereas wax coating could prevent the adhesion. Wax coating played the dual roles of a chip breaker as well as a high-performance lubricant, thus improved the surface integrity. This study demonstrated the capability of using wax coating as an environmentally friendly solid lubricant for microgrooving of single-crystal silicon and possibly for other hard brittle materials. |
DOI | doi:10.1007/s40684-020-00198-3 |
URL | 查看原文 |
收录类别 | SCI |
语种 | 英语 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/64611 |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan. Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving[J]. International Journal of Precision Engineering and Manufacturing-Green Technology,2020:14. |
APA | S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan.(2020).Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving.International Journal of Precision Engineering and Manufacturing-Green Technology,14. |
MLA | S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan."Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving".International Journal of Precision Engineering and Manufacturing-Green Technology (2020):14. |
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