High-Precision Tracking Control of a Piezoelectric Micro-nano Platform Using Sliding Mode Control with the Fractional-Order Operator

doi:10.1007/s12541-020-00423-8

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	High-Precision Tracking Control of a Piezoelectric Micro-nano Platform Using Sliding Mode Control with the Fractional-Order Operator
	R. Xu,W. Pan,Z. S. Wang and D. P. Tian
	2020
发表期刊	International Journal of Precision Engineering and Manufacturing
ISSN	2234-7593
卷号	21 期号:12 页码:2277-2286
摘要	In this paper, a sliding mode control using a fractional-order operator (SMCFO) method is presented for the hysteresis of a piezoelectric (PZT) micro-nano platform. At first, the hysteresis of the PZT micro-nano platform is described using the Duhem model. With respect to the sliding mode controller design, we introduce a fractional-order operator into the design of the sliding mode surface and enhance the performance of the proposed controller. The nonlinear switching action of the controller is eliminated through a smooth control action by applying an uncertainty and disturbance estimation technique. The stability of the proposed controller is analyzed using the Lyapunov theorem. Simulations and experimental results demonstrate that the SMCFO method achieves a no-load high precision tracking control of the PZT micro-nano platform and is also robust against load perturbations of the platform.
DOI	10.1007/s12541-020-00423-8
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收录类别	SCI ; EI
语种	英语
引用统计	被引频次：11[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64577
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	R. Xu,W. Pan,Z. S. Wang and D. P. Tian. High-Precision Tracking Control of a Piezoelectric Micro-nano Platform Using Sliding Mode Control with the Fractional-Order Operator[J]. International Journal of Precision Engineering and Manufacturing,2020,21(12):2277-2286.
APA	R. Xu,W. Pan,Z. S. Wang and D. P. Tian.(2020).High-Precision Tracking Control of a Piezoelectric Micro-nano Platform Using Sliding Mode Control with the Fractional-Order Operator.International Journal of Precision Engineering and Manufacturing,21(12),2277-2286.
MLA	R. Xu,W. Pan,Z. S. Wang and D. P. Tian."High-Precision Tracking Control of a Piezoelectric Micro-nano Platform Using Sliding Mode Control with the Fractional-Order Operator".International Journal of Precision Engineering and Manufacturing 21.12(2020):2277-2286.

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