Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics

doi:10.1016/j.ceramint.2019.12.243

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	Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics
	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi
	2020
发表期刊	Ceramics International
ISSN	0272-8842
卷号	46 期号:7 页码:9741-9750
摘要	Polymer-derived ceramics (PDCs) are promising high-performance materials for various applications, yet their brittleness represents major drawback in their machining. Femtosecond laser pulse ablation is non-contact rapid processing method used in precision machining of PDCs. Herein, two laser parameters (laser energy fluence and rotational speed) were investigated to achieve laser-material interactions and machining characteristics via machine single circular lines, blind holes, and through-holes in polymer-derived SiAlCN ceramics. With the decrease in rotational speed, the morphology of single circular lines gradually roughened and heat-affected zone was produced. Varying ablation rates were obtained at different energy fluences. For blind holes, three different ablation regions were observed. As the energy fluence increased, blind holes gradually transformed into through-holes. Through-holes with near-cylindrical profiles and minimal collateral damage were obtained. Ablation debris deposited around through-holes were indicative of N release, breaking of Si-N and C-C bonds, and formation of SiOx. Laser ablation of PDCs led to the formation of laser-induced surface structures, bubble pits, stripe structures, molten materials, and sphere-like particles.
DOI	10.1016/j.ceramint.2019.12.243
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64523
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi. Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics[J]. Ceramics International,2020,46(7):9741-9750.
APA	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi.(2020).Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics.Ceramics International,46(7),9741-9750.
MLA	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi."Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics".Ceramics International 46.7(2020):9741-9750.

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