中国科学院长春光学精密机械与物理研究所

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	Effects of annealing temperature, thickness and substrates on optical properties of m-plane ZnO films studied by photoluminescence and temperature dependent ellipsometry
	Y. Liu,T. Y. He,D. H. Chen,H. Yang,I. T. Ferguson,D. Huang and Z. C. Feng
	2020
发表期刊	Journal of Alloys and Compounds
ISSN	0925-8388
卷号	848页码:10
摘要	A series of m-plane ZnO films grown on sapphire and Si substrates with different thicknesses (186-371 nm) and different annealing temperatures (150-200 degrees C) were studied in detail by comparing X-ray diffraction, photoluminescence and spectroscopic ellipsometry measurements. The impact of thickness, annealing temperature and substrates on optical properties was investigated by the systematical analysis of the highly correlated stain, grain size, exciton effect, absorption tailing and crystallinity. Our finding indicates that the improvement of crystal quality along with the increase of grain size and refractive index for m-plane ZnO can be observed with increasing annealing temperature, increasing thickness or by introducing sapphire instead of Si substrate. The refractive index and bandgap have stronger dependence on annealing temperature than on thickness, causing the blue-shift of bandgap with rising annealing temperature despite thicker film. This bandgap shift is more pronounced for ZnO in ZnO/Si system. Photoluminescence combined with ellipsometry analysis demonstrate that higher annealing temperature can strengthen the excitonic feature. Bose-Einstein equation, employed to fit the dependence of bandgap on experimental temperature (300-583 K) illustrates that, the reduction of bandgap at elevated temperatures is more significant for ZnO in ZnO/sapphire system due to the corresponding stronger electron/exciton-phonon interactions involved with larger longitudinal optical phonon energies. (C) 2020 Elsevier B.V. All rights reserved.
DOI	10.1016/j.jallcom.2020.156631
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64478
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Liu,T. Y. He,D. H. Chen,H. Yang,I. T. Ferguson,D. Huang and Z. C. Feng. Effects of annealing temperature, thickness and substrates on optical properties of m-plane ZnO films studied by photoluminescence and temperature dependent ellipsometry[J]. Journal of Alloys and Compounds,2020,848:10.
APA	Y. Liu,T. Y. He,D. H. Chen,H. Yang,I. T. Ferguson,D. Huang and Z. C. Feng.(2020).Effects of annealing temperature, thickness and substrates on optical properties of m-plane ZnO films studied by photoluminescence and temperature dependent ellipsometry.Journal of Alloys and Compounds,848,10.
MLA	Y. Liu,T. Y. He,D. H. Chen,H. Yang,I. T. Ferguson,D. Huang and Z. C. Feng."Effects of annealing temperature, thickness and substrates on optical properties of m-plane ZnO films studied by photoluminescence and temperature dependent ellipsometry".Journal of Alloys and Compounds 848(2020):10.

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