Effect of the changes in refractive index of air on grating diffraction wavefront

doi:10.1016/j.optcom.2019.124716

CIOMP OpenIR

	Effect of the changes in refractive index of air on grating diffraction wavefront
	X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou
	2020
发表期刊	Optics Communications
ISSN	0030-4018
卷号	457 页码:7
摘要	Reduction of groove errors on the grating wavefront caused by the refractive index of air is a critical issue in ruling grating fabrication when using an interferometer to provide position feedback. We establish a mathematical model of the relationship between the grating wavefront and the refractive index of air. We then introduce two methods to measure the air's refractive index, analyze the effects of temperature, pressure and humidity on the grating wavefront, and use the advantages of the two methods to obtain the groove error compensation value. Comparative ruling experiments prove that grating wavefront quality is significantly improved after compensation of the groove errors caused by the refractive index of air.
DOI	10.1016/j.optcom.2019.124716
URL	查看原文
收录类别	SCI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64473
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou. Effect of the changes in refractive index of air on grating diffraction wavefront[J]. Optics Communications,2020,457:7.
APA	X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou.(2020).Effect of the changes in refractive index of air on grating diffraction wavefront.Optics Communications,457,7.
MLA	X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou."Effect of the changes in refractive index of air on grating diffraction wavefront".Optics Communications 457(2020):7.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Effect of the change（1320KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载