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Effect of the changes in refractive index of air on grating diffraction wavefront
X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou
2020
发表期刊Optics Communications
ISSN0030-4018
卷号457页码:7
摘要Reduction of groove errors on the grating wavefront caused by the refractive index of air is a critical issue in ruling grating fabrication when using an interferometer to provide position feedback. We establish a mathematical model of the relationship between the grating wavefront and the refractive index of air. We then introduce two methods to measure the air's refractive index, analyze the effects of temperature, pressure and humidity on the grating wavefront, and use the advantages of the two methods to obtain the groove error compensation value. Comparative ruling experiments prove that grating wavefront quality is significantly improved after compensation of the groove errors caused by the refractive index of air.
DOI10.1016/j.optcom.2019.124716
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收录类别SCI
语种英语
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文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/64473
专题中国科学院长春光学精密机械与物理研究所
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GB/T 7714
X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou. Effect of the changes in refractive index of air on grating diffraction wavefront[J]. Optics Communications,2020,457:7.
APA X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou.(2020).Effect of the changes in refractive index of air on grating diffraction wavefront.Optics Communications,457,7.
MLA X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou."Effect of the changes in refractive index of air on grating diffraction wavefront".Optics Communications 457(2020):7.
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