Effect of multiple-step annealing on the structural, optical and electrical properties of ZnO:In-N films

doi:10.1016/j.apsusc.2020.146933

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	Effect of multiple-step annealing on the structural, optical and electrical properties of ZnO:In-N films
	X. Y. Zhang,G. P. Qin,H. Zhang,W. J. Li,H. B. Ruan,L. Fang,C. Z. Tong and C. Y. Kong
	2020
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	527 页码:5
摘要	The intrinsic defects in ZnO:In-N films can be regulated efficiently by multiple-step annealing together with the ambient atmosphere. Correspondingly, the conductivity of films changes from n to p-type, then to n-type (n -> p -> n). The experimental results indicate high-quality films annealed at 600 degrees C for 8 min in N-2 ambience can be obtained by the analysis of X-ray diffraction (XRD) patterns and the concentrations of donor defects (Zn-i, V-O) are dramatically decreased from Raman and photoluminescence (PL) spectra. When the films are further annealed in air for 3 min, the concentrations of acceptors such as oxygen interstitials (O-i) are increased slightly. Meanwhile, N-related acceptor complexes in the films are dominantly activated in terms of relative X-ray photoelectron spectroscopy (XPS) peak area ratio of P-1 (395.5 eV) and P-2 (397.3 eV) to P-3 (403.5 eV), which plays an important role in realizing the conversion of the ZnO p-type conductivity. Noted that the p-type ZnO:In-N films with the hole concentration of 10(17) cm(-3) can be obtained in this way.
DOI	10.1016/j.apsusc.2020.146933
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64471
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Y. Zhang,G. P. Qin,H. Zhang,W. J. Li,H. B. Ruan,L. Fang,C. Z. Tong and C. Y. Kong. Effect of multiple-step annealing on the structural, optical and electrical properties of ZnO:In-N films[J]. Applied Surface Science,2020,527:5.
APA	X. Y. Zhang,G. P. Qin,H. Zhang,W. J. Li,H. B. Ruan,L. Fang,C. Z. Tong and C. Y. Kong.(2020).Effect of multiple-step annealing on the structural, optical and electrical properties of ZnO:In-N films.Applied Surface Science,527,5.
MLA	X. Y. Zhang,G. P. Qin,H. Zhang,W. J. Li,H. B. Ruan,L. Fang,C. Z. Tong and C. Y. Kong."Effect of multiple-step annealing on the structural, optical and electrical properties of ZnO:In-N films".Applied Surface Science 527(2020):5.

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