Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

doi:10.3390/app10155057

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	Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors
	C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao
	2020
发表期刊	Applied Sciences-Basel
卷号	10 期号:15 页码:13
摘要	A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are +/- 2.5 '' and +/- 3.5 '' without correction, and the residuals are +/- 1.9 '' and +/- 2.8 '' after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from +/- 4.8 mu m to +/- 2.8 mu m and +/- 5.9 mu m to +/- 3.6 mu m, respectively. The comparison deviation of the roll is +/- 4.3 ''. The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system.
DOI	10.3390/app10155057
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收录类别	SCI
语种	英语
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64369
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao. Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors[J]. Applied Sciences-Basel,2020,10(15):13.
APA	C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao.(2020).Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors.Applied Sciences-Basel,10(15),13.
MLA	C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao."Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors".Applied Sciences-Basel 10.15(2020):13.

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