Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status

doi:10.1016/j.apm.2019.04.059

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	Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status
	Y.Deng; Z.Liu; Y.Wang; H.Duan; J.G.Korvink
	2019
发表期刊	Applied Mathematical Modelling
ISSN	0307904X
卷号	74 页码:621-640
摘要	Robust CassieBaxter wettability of a rough solid surface with micro-textures is a key factor for stable hydrophobicity. Overlayed micro-textures are potentially more effective in ensuring the robustness of the surface properties, because of the layer-by-layer increase of the duty ratio and their effective approximation of the full hierarchy. However, a design methodology that includes considering manufacturability is lacking. In this article, we address this deficiency and present a monolithic inverse design approach, composed of a series of topology optimizations, to derive micro-textures with hierarchy approximated by overlayed geometries. The optimization are implemented in a dimensionless manner using a periodic regular-polygon tiling of the plane, in which the corresponding dimensionless Young-Laplace equation is used to describe the physics at the liquid/vapor interface. Two sequential and neighboring optimization tasks are linked through the design domain of the downward layer, determined by a conformal extension of the physical density representing the pattern of the upward layer. This ensures the manufacturability e.g. for an overlayed lithography process. Layer-by-layer robustness enhancement is thereby achieved, and the capability to anchor the three-phase contact line after the collapse of the liquid/vapor interface supported by the upward layer. In generating the overlayed micro-textures, a rigorous scaling factor for the patterns was determined, leading to a recursion inequality based on the depth of the liquid/vapor interfaces at the critical static pressures that determines the extrusion distance of the patterns. The trace height and minimal aspect ratio of the micro-textures are specified by the scaling factor and extrusion distance for a layer. This allows a compromise between performance and manufacturability, and thereby avoid instabilities caused by elasto-capillary collapse of the micro-/nano-structures. We computationally confirm the optimality by comparing the derived micro-textures with previously reported designs. 2019 Elsevier Inc.
关键词	Lithography,Aspect ratio,Design,Extrusion,Liquids
DOI	10.1016/j.apm.2019.04.059
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63421
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.Deng,Z.Liu,Y.Wang,et al. Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status[J]. Applied Mathematical Modelling,2019,74:621-640.
APA	Y.Deng,Z.Liu,Y.Wang,H.Duan,&J.G.Korvink.(2019).Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status.Applied Mathematical Modelling,74,621-640.
MLA	Y.Deng,et al."Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status".Applied Mathematical Modelling 74(2019):621-640.

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