Adjustable flexure mount to compensate for deformation of an optic surface

doi:10.1364/ao.58.009370

CIOMP OpenIR

	Adjustable flexure mount to compensate for deformation of an optic surface
	Z.Feng; Y.Jie; L.P.Wang; Y.M.Li; H.T.Zhang; M.Quan; L.Qiang
	2019
发表期刊	Applied Optics
ISSN	1559-128X
卷号	58 期号:34 页码:9370-9375
摘要	An adjustable mounting structure is proposed to compensate for surface deformation of a mirror caused by the assembly process. The mount adopts a six-point support based on the kinematic mount principle. Three of the support points are adjustable, and they are moved along the axial direction by actuators. Surface deformation is expressed by Zernike coefficients in this paper, and a sensitivity matrix of the surface deformation is established by varying the unit displacement of each adjustment support point and getting the corresponding Zernike coefficient changes. The surface deformation is measured, and the compensation adjustment of each adjustable support point is then obtained by anti-sensitivity calculation. Finally, the feasibility of present support structure design and surface figure compensating method are verified by experiments. The experimental results show that the present structure and method could significantly reduce the surface deformation caused by the assembly process. The surface deformation is 4.6 nm RMS after assembly and it is decreased to 1.3 nm RMS after four iterations of compensation, which is close to the 1.1 nm RMS after optical polishing. (C) 2019 Optical Society of America
关键词	zernike polynomials,kinematic couplings,design,Optics
DOI	10.1364/ao.58.009370
URL	查看原文
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63390
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Z.Feng,Y.Jie,L.P.Wang,et al. Adjustable flexure mount to compensate for deformation of an optic surface[J]. Applied Optics,2019,58(34):9370-9375.
APA	Z.Feng.,Y.Jie.,L.P.Wang.,Y.M.Li.,H.T.Zhang.,...&L.Qiang.(2019).Adjustable flexure mount to compensate for deformation of an optic surface.Applied Optics,58(34),9370-9375.
MLA	Z.Feng,et al."Adjustable flexure mount to compensate for deformation of an optic surface".Applied Optics 58.34(2019):9370-9375.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Adjustable flexure m（2087KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览请求全文