Development of grating-based precise displacement measurement technology

doi:10.3788/CO.20191204.0741

CIOMP OpenIR

	Development of grating-based precise displacement measurement technology
	X.Gao; S.-H.Li; Q.-L.Ma; W.Chen
	2019
发表期刊	Chinese Optics
ISSN	20951531
卷号	12 期号:4 页码:741-752
摘要	Precision measurement is the basis of precision machining and it's one of the decisive factors of manufacturing accuracy in the manufacturing industry. It is widely used in the field of contemporary precision machinery manufacturing. The grating-based precise displacement measurement system play an important role in the field of precise displacement measurement because of its small environmental requirements and high resolution. The grating-based precise displacement measurement system includes optical measurement, signal reception, electronic subdivision and integral adjustment. In this paper, the optical path of optical measurement is introduced. Firstly, the principles of classical grating interferometric displacement measurement are introduced. Secondly, the key technologies of the grating-based precise displacement measurement system are summarized. Thirdly, the latest representative measurement techniques are compared and analyzed, and their advantages and disadvantages are summarized. Finally, prospects are provided for the future of grating-based precise displacement measurement technology wherein the development trend of its high precision, high resolution, high robustness, miniaturization, multi-dimension and multi-technological fusion are revealed. 2019, China Science Publishing & Media LTD. All right reserved.
关键词	Displacement measurement,Diffraction gratings,Machinery,Manufacture
DOI	10.3788/CO.20191204.0741
URL	查看原文
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63371
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X.Gao,S.-H.Li,Q.-L.Ma,et al. Development of grating-based precise displacement measurement technology[J]. Chinese Optics,2019,12(4):741-752.
APA	X.Gao,S.-H.Li,Q.-L.Ma,&W.Chen.(2019).Development of grating-based precise displacement measurement technology.Chinese Optics,12(4),741-752.
MLA	X.Gao,et al."Development of grating-based precise displacement measurement technology".Chinese Optics 12.4(2019):741-752.

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