Maskless formation of uniform subwavelength periodic surface structures by double temporally-delayed femtosecond laser beams

doi:10.1016/j.apsusc.2018.12.029

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	Maskless formation of uniform subwavelength periodic surface structures by double temporally-delayed femtosecond laser beams
	S.A.Jalil; J.J.Yang; M.ElKabbash; S.C.Singh; C.L.Guo
	2019
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	471 页码:516-520
摘要	Surface structures with nanoscale size and periodicity are important in controlling the flow of light as well as light-matter interaction. Fabrication of these periodic nanostructure requires sophisticated and expensive nanofabrication methods that limits large scale production of such structures. Laser induced periodic surface structures (LIPSS) is a scalable and cheap method to create periodic structures. However, they suffer from lacking a long-range order. Here, we present a maskless fabrication technique of creating highly uniform sub-wavelength structures on nickel surface, using two collinear femtosecond laser beams at various temporal delays. Our femtosecond laser induced periodic surface structures (FLIPSSs) show a high spatial uniformity with a grating period ranging between 320-350 nm. The high spatial uniformity is a consequence of using two pulsed beams with short inter-beam delay time due to reduction in the propagation length of excited surface plasmon polaritons (SPPs). The sub-wavelength period is due to grating splitting mechanism where the two beams sequentially interact with existing structures to create a superimposed grating. The demonstrated fabrication method enables large scale fabrication of regular sub-wavelength structures.
关键词	Laser-matter interaction,Nanostructures,FLIPSSs,Ultrafast phenomenon,Surface plasmon,Nanofabrication,lithography
DOI	10.1016/j.apsusc.2018.12.029
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63314
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S.A.Jalil,J.J.Yang,M.ElKabbash,et al. Maskless formation of uniform subwavelength periodic surface structures by double temporally-delayed femtosecond laser beams[J]. Applied Surface Science,2019,471:516-520.
APA	S.A.Jalil,J.J.Yang,M.ElKabbash,S.C.Singh,&C.L.Guo.(2019).Maskless formation of uniform subwavelength periodic surface structures by double temporally-delayed femtosecond laser beams.Applied Surface Science,471,516-520.
MLA	S.A.Jalil,et al."Maskless formation of uniform subwavelength periodic surface structures by double temporally-delayed femtosecond laser beams".Applied Surface Science 471(2019):516-520.

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