Design and fabrication of robust broadband extreme ultraviolet multilayers

doi:10.1063/1.5057714

CIOMP OpenIR

	Design and fabrication of robust broadband extreme ultraviolet multilayers
	S.Q.Kuang; J.B.Wang; H.G.Yang; T.L.Huo; H.J.Zhou
	2019
发表期刊	Aip Advances
卷号	9 期号:4 页码:5
摘要	The robust designs of broadband extreme ultraviolet multilayers based on the multiobjective genetic algorithm are validated experimentally. In order to reduce the influence of random layer thickness fluctuations on the great deformation of the experimental reflection of extreme ultraviolet multilayer with a wide angular band, the multiobjective genetic algorithm has been improved to optimize the multilayer system composed by the layer thicknesses which can be controlled precisely. The robust designs of broadband Mo/Si multilayers were fabricated, and the experimental results were presented and analyzed, and then the advantage of robust multilayer designs was demonstrated. (C) 2019 Author(s).
关键词	mirrors,Science & Technology - Other Topics,Materials Science,Physics
DOI	10.1063/1.5057714
URL	查看原文
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63284
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S.Q.Kuang,J.B.Wang,H.G.Yang,et al. Design and fabrication of robust broadband extreme ultraviolet multilayers[J]. Aip Advances,2019,9(4):5.
APA	S.Q.Kuang,J.B.Wang,H.G.Yang,T.L.Huo,&H.J.Zhou.(2019).Design and fabrication of robust broadband extreme ultraviolet multilayers.Aip Advances,9(4),5.
MLA	S.Q.Kuang,et al."Design and fabrication of robust broadband extreme ultraviolet multilayers".Aip Advances 9.4(2019):5.

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