The role of DUV laser irradiation in the optical and electrical properties of indium zinc oxide films synthesized by self-combustion

doi:10.1016/j.jallcom.2019.07.171

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	The role of DUV laser irradiation in the optical and electrical properties of indium zinc oxide films synthesized by self-combustion
	P.Li; J.Duan; J.G.Ma; T.F.Wang; H.Y.Xu; Y.C.Liu
	2019
发表期刊	Journal of Alloys and Compounds
ISSN	0925-8388
卷号	806 页码:327-334
摘要	Highly conductive and transparent amorphous IZO films were fabricated by combining deep ultraviolet (DUV) excimer laser irradiation with solution combustion synthesis at low temperature. The influence of laser energy densities on the crystallinities, surface morphologies, and optical and electrical properties of the IZO films was investigated by using X-ray diffraction, scanning electron microscope, atomic force microscope, UV-vis spectroscopy, and Hall test. Additionally, Fourier-transform infrared spectroscopy showed that DUV laser irradiation led to the removal of organic residuals and hydroxyl groups. X-ray photoelectron spectroscopy showed that the percentage of metal-oxide-metal bonds in the IZO films increased significantly after the laser irradiation, which was beneficial for the electron transportation. As a result, the IZO films exhibited resistivity as low as 4.2 x 10(-3) U cm with average visible transmittance as high as 91%, which yielded the highest Figure of Merit among the solution-processed transparent conducting films prepared at a temperature as low as 200 degrees C. (C) 2019 Elsevier B.V. All rights reserved.
关键词	Transparent conducting film,Indium zinc oxide,Low temperature,Laser,irradiation,Solution combustion,low-temperature,thin-films,transparent
DOI	10.1016/j.jallcom.2019.07.171
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63259
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	P.Li,J.Duan,J.G.Ma,et al. The role of DUV laser irradiation in the optical and electrical properties of indium zinc oxide films synthesized by self-combustion[J]. Journal of Alloys and Compounds,2019,806:327-334.
APA	P.Li,J.Duan,J.G.Ma,T.F.Wang,H.Y.Xu,&Y.C.Liu.(2019).The role of DUV laser irradiation in the optical and electrical properties of indium zinc oxide films synthesized by self-combustion.Journal of Alloys and Compounds,806,327-334.
MLA	P.Li,et al."The role of DUV laser irradiation in the optical and electrical properties of indium zinc oxide films synthesized by self-combustion".Journal of Alloys and Compounds 806(2019):327-334.

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