Dynamic linear modeling, identification and precise control of a walking piezo-actuated stage

doi:10.1016/j.ymssp.2019.03.037

CIOMP OpenIR

	Dynamic linear modeling, identification and precise control of a walking piezo-actuated stage
	P.Z.Li; X.D.Wang; L.Zhao; D.F.Zhang; K.Guo
	2019
发表期刊	Mechanical Systems and Signal Processing
ISSN	0888-3270
卷号	128 页码:141-152
摘要	In this paper, a dynamic model is firstly investigated for a flexible mechanical stage driven by a walking piezoelectric actuator (WPA). The developed model takes into account the WPA, the mechanical stage and moreover the connection part between them as an overall piezo-actuated stage. The model of the WPA is derived mainly from the electrical, piezoelectric and mechanical sides. Besides, the WPA and mechanical stage are treated as elements with lumped mass. Then the proposed model is identified based on the open-loop frequency response data. Finally, hybrid closed-loop controllers are designed for pointto-point (PTP) positioning and sinusoidal trajectory tracking control of the overall piezoactuated stage. The hybrid control strategy includes displacement error feedback and velocity feed-forward control algorithms. Furthermore, the transient profile and tracking differentiator is proposed for quick settling of PTP positioning control, and the discretetime repetitive controller (RC) is adopted to enhance the tracking precision for the periodic sinusoidal trajectory. Experimental results show that for the 300 mu m PTP positioning the settling time is 0.12 s to keep the steady error within 25 nm, and for the sinusoidal trajectory of 50 mu m amplitude the maximum tracking error is 1.99%. These results clearly demonstrate the high precision performance of the developed hybrid controllers for the walking piezo-actuated stage. (C) 2019 Elsevier Ltd. All rights reserved.
关键词	Walking piezoelectric actuator,Frequency response,Hybrid control,Trajectory tracking,Tracking differentiator,Repetitive control,repetitive control,system,Engineering
DOI	10.1016/j.ymssp.2019.03.037
URL	查看原文
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63257
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	P.Z.Li,X.D.Wang,L.Zhao,et al. Dynamic linear modeling, identification and precise control of a walking piezo-actuated stage[J]. Mechanical Systems and Signal Processing,2019,128:141-152.
APA	P.Z.Li,X.D.Wang,L.Zhao,D.F.Zhang,&K.Guo.(2019).Dynamic linear modeling, identification and precise control of a walking piezo-actuated stage.Mechanical Systems and Signal Processing,128,141-152.
MLA	P.Z.Li,et al."Dynamic linear modeling, identification and precise control of a walking piezo-actuated stage".Mechanical Systems and Signal Processing 128(2019):141-152.

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