48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs

doi:10.1364/AO.58.008383

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	48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs
	Y.Li; J.Tao; Y.Zhao; J.Wang; J.Lv; Y.Qin; J.Liang; W.Wang
	2019
发表期刊	Applied Optics
ISSN	1559128X
卷号	58 期号:31 页码:8383-8389
摘要	This paper reports on the design and fabrication of a 48 48 full-color pixelated addressable light-emitting diode on silicon (LEDoS) micro display. The metallization pattern was designed and fabricated on a silicon substrate, while red, green, and blue monochromatic micro LEDs were integrated on the silicon substrate using transfer printing. The red, green, and blue micro LEDs are flip-chip structures in which red micro LEDs were fabricated using substrate transfer, mesa etching, metal deposition, and chip dicing. The integration process does not require wire bonding, which reduces the full-color pixel size and increases the integration speed. The LEDoS micro display can be addressed individually for each LED pixel and display representative patterns. 2019 Optical Society of America.
关键词	Light emitting diodes,Color,Etching,Flip chip devices,Pixels,Substrates
DOI	10.1364/AO.58.008383
URL	查看原文
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63236
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.Li,J.Tao,Y.Zhao,et al. 48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs[J]. Applied Optics,2019,58(31):8383-8389.
APA	Y.Li.,J.Tao.,Y.Zhao.,J.Wang.,J.Lv.,...&W.Wang.(2019).48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs.Applied Optics,58(31),8383-8389.
MLA	Y.Li,et al."48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs".Applied Optics 58.31(2019):8383-8389.

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