Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine

doi:10.1109/access.2019.2934829

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	Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine
	Y.P.Li; Y.Zhao; Z.Wang; C.Fang; W.Sha
	2019
发表期刊	Ieee Access
ISSN	2169-3536
卷号	7 页码:112736-112741
摘要	A high-precision stability measurement scheme was designed and prototyped with the purpose of ensuring precise laser beam alignment during the assembly of an integrated interferometer. With retroreflectors added, the angular resolution of the system is improved while ensuring system stability. Hydroxide-catalysis bonding technology is used to create a stress-free bond between the various optical components of the system. After calibration using the coordinate measuring machine, the device achieved a measurement accuracy of +/- 6 mu m for the absolute position of the laser beam in the global coordinate system. In angular measurements, an accuracy of +/- 21 mu rad was attained. Over a 2-month period, the maximum positional drifts and the maximum angular drifts of the calibration parameters were +/- 3 mu m and +/- 27 mu rad, respectively.
关键词	Laser beams,measurement,retroreflector,hydroxide-catalysis bonding,coordinate measuring machine,calibration,Computer Science,Engineering,Telecommunications
DOI	10.1109/access.2019.2934829
URL	查看原文
收录类别	SCI
语种	英语
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63231
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.P.Li,Y.Zhao,Z.Wang,et al. Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine[J]. Ieee Access,2019,7:112736-112741.
APA	Y.P.Li,Y.Zhao,Z.Wang,C.Fang,&W.Sha.(2019).Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine.Ieee Access,7,112736-112741.
MLA	Y.P.Li,et al."Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine".Ieee Access 7(2019):112736-112741.

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