Application of Micro Quartz Tuning Fork in Trace Gas Sensing by Use of Quartz-Enhanced Photoacoustic Spectroscopy

doi:10.3390/s19235240

CIOMP OpenIR

	Application of Micro Quartz Tuning Fork in Trace Gas Sensing by Use of Quartz-Enhanced Photoacoustic Spectroscopy
	H.Y.Lin; Z.Huang; R.F.Kan; H.D.Zheng; Y.H.Liu; B.Liu
	2019
发表期刊	Sensors
卷号	19 期号:23 页码:13
摘要	A novel quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor based on a micro quartz tuning fork (QTF) is reported. As a photoacoustic transducer, a novel micro QTF was 3.7 times smaller than the usually used standard QTF, resulting in a gas sampling volume of similar to 0.1 mm(3). As a proof of concept, water vapor in the air was detected by using 1.39 mu m distributed feedback (DFB) laser. A detailed analysis of the performance of a QEPAS sensor based on the micro QTF was performed by detecting atmosphere H2O. The laser focus position and the laser modulation depth were optimized to improve the QEPAS excitation efficiency. A pair of acoustic micro resonators (AmRs) was assembled with the micro QTF in an on-beam configuration to enhance the photoacoustic signal. The AmRs geometry was optimized to amplify the acoustic resonance. With a 1 s integration time, a normalized noise equivalent absorption coefficient (NNEA) of 1.97 x 10(-8) Wcm(-1)Hz(-1/2) was achieved when detecting H2O at less than 1 atm.
关键词	quartz tuning fork,photoacoustic spectroscopy,quartz-enhanced,acoustic detection module,sensor
DOI	10.3390/s19235240
URL	查看原文
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63220
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H.Y.Lin,Z.Huang,R.F.Kan,et al. Application of Micro Quartz Tuning Fork in Trace Gas Sensing by Use of Quartz-Enhanced Photoacoustic Spectroscopy[J]. Sensors,2019,19(23):13.
APA	H.Y.Lin,Z.Huang,R.F.Kan,H.D.Zheng,Y.H.Liu,&B.Liu.(2019).Application of Micro Quartz Tuning Fork in Trace Gas Sensing by Use of Quartz-Enhanced Photoacoustic Spectroscopy.Sensors,19(23),13.
MLA	H.Y.Lin,et al."Application of Micro Quartz Tuning Fork in Trace Gas Sensing by Use of Quartz-Enhanced Photoacoustic Spectroscopy".Sensors 19.23(2019):13.

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