Ultra-precision grinding and polishing method of large-scale Al2O3 ceramic guides

doi:10.3788/CO.20191203.0663

CIOMP OpenIR

	Ultra-precision grinding and polishing method of large-scale Al2O3 ceramic guides
	J.Liu; L.-M.Cai; X.-K.Cheng; G.-G.Gu; Y.Yu
	2019
发表期刊	Chinese Optics
ISSN	20951531
卷号	12 期号:3 页码:663-669
摘要	In order to improve the ultra-precision polishing efficiency of Al2O3 ceramic guides, the relationship between polishing parameters such as polishing pressure, polishing speed, abrasive added interval and polishing efficiency was analyzed. Firstly, the polishing discs and abrasive material were selected based on the physical parameters and characteristics of Al2O3 ceramic guide. Secondly, taking the high precision plane parallel crystal as the detection tool, the number of stripes between the crystal and guide were quantitatively used to determine the polishing efficiency. At the end, the best processing parameters for the Al2O3 ceramic guide were obtained: polishing pressure should be controlled to be around 40 N; the line speed of polishing should be 45 m/min; a grinding agent should be added every 30 minutes. Within the same amount of time, this set of process parameters will obtain higher surface accuracy. 2019, China Science Publishing & Media LTD. All right reserved.
关键词	Polishing,Alumina,Aluminum oxide,Ceramic materials,Efficiency,Grinding (machining),Grinding mills
DOI	10.3788/CO.20191203.0663
URL	查看原文
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63199
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	J.Liu,L.-M.Cai,X.-K.Cheng,et al. Ultra-precision grinding and polishing method of large-scale Al2O3 ceramic guides[J]. Chinese Optics,2019,12(3):663-669.
APA	J.Liu,L.-M.Cai,X.-K.Cheng,G.-G.Gu,&Y.Yu.(2019).Ultra-precision grinding and polishing method of large-scale Al2O3 ceramic guides.Chinese Optics,12(3),663-669.
MLA	J.Liu,et al."Ultra-precision grinding and polishing method of large-scale Al2O3 ceramic guides".Chinese Optics 12.3(2019):663-669.

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