Imaging quality evaluation of soft X-ray grazing incidence telescope

doi:10.3788/OPE.20192710.2136

CIOMP OpenIR

	Imaging quality evaluation of soft X-ray grazing incidence telescope
	P.Liu; B.Chen; Y.-C.Zhang; L.-P.He; X.-D.Wang
	2019
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	27 期号:10 页码:2136-2143
摘要	In order to evaluate the imaging quality of the soft X-ray grazing incidence telescope, an image quality evaluation method using ZEMAX and MATLAB is proposed. The image quality evaluation program written according to this method not only considers the aperture diffraction, the geometric aberration and the alignment errors, but also adds the telescope surface figure errors and the surface scatter effects. Using the Legendre-Fourier polynomial and User Defined Surface, a cylindrical mirror model with figure errors is created in ZEMAX, to simulate the real surface profile grazing incidence telescope. The BSDF scattering model is established according to the Harvey-Shack surface scattering theory to simulate X-ray scattering. The X-ray finite distance imaging experimental facility is built for verifying the image quality evaluation program. The comparison between the experimental results and the simulation results of the image quality evaluation program shows that the light intensity distribution of the experimental spot and simulation spot is basically the same. Using the experimental result as a standard, the relative errors of the horizontal and longitudinal directions of the simulated spot FWHM were 14.7% and 11.3%, respectively. It is proved that the simulation results of the image quality evaluation program are credible and have certain guiding significance for the design and processing of the grazing incidence optical system. 2019, Science Press. All right reserved.
关键词	Image quality,Errors,MATLAB,Optical systems,Plasma interactions,Quality control,Surface scattering,Telescopes,X ray optics,X ray scattering,X rays
DOI	10.3788/OPE.20192710.2136
URL	查看原文
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63189
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	P.Liu,B.Chen,Y.-C.Zhang,et al. Imaging quality evaluation of soft X-ray grazing incidence telescope[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2019,27(10):2136-2143.
APA	P.Liu,B.Chen,Y.-C.Zhang,L.-P.He,&X.-D.Wang.(2019).Imaging quality evaluation of soft X-ray grazing incidence telescope.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,27(10),2136-2143.
MLA	P.Liu,et al."Imaging quality evaluation of soft X-ray grazing incidence telescope".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 27.10(2019):2136-2143.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Imaging quality eval（2474KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载