Fast method to detect and calculate displacement errors in a Littrow grating-based interferometer

doi:10.1364/ao.58.003193

CIOMP OpenIR

	Fast method to detect and calculate displacement errors in a Littrow grating-based interferometer
	Q.Lv; Z.W.Liu; W.Wang; S.Jiang; Bayanheshig; W.H.Li
	2019
发表期刊	Applied Optics
ISSN	1559-128X
卷号	58 期号:12 页码:3193-3199
摘要	Grating-based interferometers play important roles in precision displacement measurements. Gratings are the core components of grating-based interferometers, and grating surface errors and line errors seriously affect measurement accuracy, especially in systems with Littrow configurations. A fast, accurate method to calculate displacement errors caused by grating surface errors and line errors in a grating-based interferometer with a Littrow configuration is proposed. Displacement errors are calculated using the diffracted wavefronts at the +/- 1st orders of the grating. Experimental comparison of the displacements of a grating-based interferometer and a laser interferometer verifies the correctness of the proposed method. The differences between the calculated and measured displacement error results are within 40 nm. The method is accurate, fast, and low cost and is highly significant for system error compensation and improvement of the measurement accuracy of grating-based interferometers. (C) 2019 Optical Society of America
关键词	heterodyne interferometer,laser,encoder,Optics
DOI	10.1364/ao.58.003193
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63149
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Q.Lv,Z.W.Liu,W.Wang,et al. Fast method to detect and calculate displacement errors in a Littrow grating-based interferometer[J]. Applied Optics,2019,58(12):3193-3199.
APA	Q.Lv,Z.W.Liu,W.Wang,S.Jiang,Bayanheshig,&W.H.Li.(2019).Fast method to detect and calculate displacement errors in a Littrow grating-based interferometer.Applied Optics,58(12),3193-3199.
MLA	Q.Lv,et al."Fast method to detect and calculate displacement errors in a Littrow grating-based interferometer".Applied Optics 58.12(2019):3193-3199.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Fast method to detec（1371KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载