Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront

doi:10.1016/j.optlastec.2019.105675

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	Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront
	X.T.Mi; S.W.Zhang; X.D.Qi; H.Z.Yu; J.X.Zhou; S.B.Jiang
	2019
发表期刊	Optics and Laser Technology
ISSN	0030-3992
卷号	119 页码:6
摘要	As the grating area increases, the non-uniformity of the metal film thickness becomes one of the main factors affecting both the grating surface error and the wavefront of the grating diffraction order. We study the theoretical model of the relationship between the metal film thickness non-uniformity and the grating diffraction wavefront error, analyze the effects of the relevant factors on the thickness of the metal films, and determine the values of these factors using theoretical and experimental methods. We also perform a ruling experiment to verify that the wavefront quality of the grating increases with improvement in the film thickness uniformity.
关键词	Gratings,Metal film thickness non-uniformity,Grating diffraction,wavefront error,echelle gratings,error,resolution,Optics,Physics
DOI	10.1016/j.optlastec.2019.105675
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63135
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X.T.Mi,S.W.Zhang,X.D.Qi,et al. Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront[J]. Optics and Laser Technology,2019,119:6.
APA	X.T.Mi,S.W.Zhang,X.D.Qi,H.Z.Yu,J.X.Zhou,&S.B.Jiang.(2019).Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront.Optics and Laser Technology,119,6.
MLA	X.T.Mi,et al."Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront".Optics and Laser Technology 119(2019):6.

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