Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

doi:10.1007/s13320-019-0537-x

CIOMP OpenIR

	Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography
	Y.Song; Bayanheshig; S.Li; S.Jiang; W.Wang
	2019
发表期刊	Photonic Sensors
ISSN	1674-9251
卷号	9 期号:4 页码:344-355
摘要	To obtain a good interference fringe contrast and high fidelity, an automated beam iterative alignment is achieved in scanning beam interference lithography (SBIL). To solve the problem of alignment failure caused by a large beam angle (or position) overshoot exceeding the detector range while also speeding up the convergence, a weighted iterative algorithm using a weight parameter that is changed linearly piecewise is proposed. The changes in the beam angle and position deviation during the alignment process based on different iterative algorithms are compared by experiment and simulation. The results show that the proposed iterative algorithm can be used to suppress the beam angle (or position) overshoot, avoiding alignment failure caused by over-ranging. In addition, the convergence speed can be effectively increased. The algorithm proposed can optimize the beam alignment process in SBIL.
关键词	Piecewise linear weighted iterative algorithm,beam alignment,scanning,beam interference lithography (SBIL),overshoot suppression,convergence,speed,femtosecond laser,fabrication,gratings,crystal,system,Instruments & Instrumentation,Optics
DOI	10.1007/s13320-019-0537-x
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63073
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.Song,Bayanheshig,S.Li,et al. Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography[J]. Photonic Sensors,2019,9(4):344-355.
APA	Y.Song,Bayanheshig,S.Li,S.Jiang,&W.Wang.(2019).Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography.Photonic Sensors,9(4),344-355.
MLA	Y.Song,et al."Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography".Photonic Sensors 9.4(2019):344-355.

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