Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma

doi:10.1007/s41365-019-0547-9

CIOMP OpenIR

	Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma
	Y.Wang; Q.P.Lu; Y.G.Gao; X.P.Gong; Y.Song
	2019
发表期刊	Nuclear Science and Techniques
ISSN	1001-8042
卷号	30 期号:2 页码:9
摘要	Removal of X-ray-induced carbon contamination on beamline optics was studied using radio-frequency plasma with an argon/hydrogen (Ar/H-2) mixture. Experiments demonstrated that the carbon removal rate with Ar/H-2 plasma was higher than that with pure hydrogen or argon. The possible mechanism for this enhanced removal was discussed. The key working parameters for Ar/H-2 plasma removal were determined, including the optimal vacuum pressure, gas mixing ratio, and source power. The optimal process was performed on a carbon-coated multilayer, and the reflectivity was recovered.
关键词	Radio-frequency plasma,X-ray irradiation,Carbon contamination,hydrogen,ion,erosion,Nuclear Science & Technology,Physics
DOI	10.1007/s41365-019-0547-9
收录类别	SCI
语种	英语
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62974
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.Wang,Q.P.Lu,Y.G.Gao,et al. Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma[J]. Nuclear Science and Techniques,2019,30(2):9.
APA	Y.Wang,Q.P.Lu,Y.G.Gao,X.P.Gong,&Y.Song.(2019).Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma.Nuclear Science and Techniques,30(2),9.
MLA	Y.Wang,et al."Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma".Nuclear Science and Techniques 30.2(2019):9.

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