Non-equilibrium heat transport of electron in Cu films irradiated by three femtosecond laser beams

doi:10.3788/IRLA201948.0206001

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	Non-equilibrium heat transport of electron in Cu films irradiated by three femtosecond laser beams
	X.Xu; X.Li; Q.Wang; F.Yang; Y.Gao; X.Li
	2019
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
ISSN	10072276
卷号	48 期号:2
摘要	To observe the changes of electron non-equilibrium heat transport time with the femtosecond laser beam parameters in the Cu films, the electron and the lattice temperature curves were studied based on the finite element method and the experimental testing. The simulation results show that the time of electron non-equilibrium heat transport in Cu films will rise with the increasing of both the pump beams number and the energy density of the pulses. The time of electron non-equilibrium heat transport by three pump beams heating was three times higher than that by the single pump beam heating. These results were verified by three femtosecond laser beams pump-probe experimental system. The experimental results show that the transient reflectivity of the Cu films appear three peaks when the Cu films are irradiated by three pump beams with a certain delay, and the time of electron non-equilibrium heat transport has been prolonged greatly. Consequently, the thermal barrier of the device processing is eliminated and the quality, accuracy and efficiency of the femtosecond laser processing are improved. 2019, Editorial Board of Journal of Infrared and Laser Engineering. All right reserved.
关键词	Femtosecond lasers,Electrons,Heat transfer,Laser beams,Metallic films,Optical pumping,Reflection
DOI	10.3788/IRLA201948.0206001
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收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62912
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X.Xu,X.Li,Q.Wang,et al. Non-equilibrium heat transport of electron in Cu films irradiated by three femtosecond laser beams[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2019,48(2).
APA	X.Xu,X.Li,Q.Wang,F.Yang,Y.Gao,&X.Li.(2019).Non-equilibrium heat transport of electron in Cu films irradiated by three femtosecond laser beams.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,48(2).
MLA	X.Xu,et al."Non-equilibrium heat transport of electron in Cu films irradiated by three femtosecond laser beams".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 48.2(2019).

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