Subaperture stitching testing for fine flat mirrors with large apertures using an orthonormal polynomial fitting algorithm

doi:10.1016/j.optlaseng.2019.02.017

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	Subaperture stitching testing for fine flat mirrors with large apertures using an orthonormal polynomial fitting algorithm
	L.S.Yan; W.Luo; G.J.Yan; X.K.Wang; H.D.Zhang; L.Y.Chao
	2019
发表期刊	Optics and Lasers in Engineering
ISSN	0143-8166
卷号	120 页码:49-58
摘要	Interferometry, which measures the difference between a reference surface and a test surface, is widely used in high-precision testing. Usually the reference surface is considered as perfect and the surface errors there can be ignored during the testing. Considering the interferometry for fine optics with large apertures where the error of the reference surface is non-ignorable, we propose a stitching algorithm based on an orthonormal polynomial fitting method that can be used to accomplish the testing of both the reference surface and the surface under test simultaneously. To evaluate the accuracy of the above algorithm, the performance of the proposed method was analyzed by testing the tertiary mirror for the Thirty-Meter Telescope project (TMT project) and utilizing the algorithm in the simulation. Further, a practical experiment was implemented to demonstrate the practicability of the proposed method.
关键词	Interferometry，Flat surfaces，Stitching，Orthonormal polynomial，Optics
DOI	10.1016/j.optlaseng.2019.02.017
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62897
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L.S.Yan,W.Luo,G.J.Yan,et al. Subaperture stitching testing for fine flat mirrors with large apertures using an orthonormal polynomial fitting algorithm[J]. Optics and Lasers in Engineering,2019,120:49-58.
APA	L.S.Yan,W.Luo,G.J.Yan,X.K.Wang,H.D.Zhang,&L.Y.Chao.(2019).Subaperture stitching testing for fine flat mirrors with large apertures using an orthonormal polynomial fitting algorithm.Optics and Lasers in Engineering,120,49-58.
MLA	L.S.Yan,et al."Subaperture stitching testing for fine flat mirrors with large apertures using an orthonormal polynomial fitting algorithm".Optics and Lasers in Engineering 120(2019):49-58.

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