Real time monitoring technology for full aperture grating diffraction wavefront with high frequency error

doi:10.1016/j.optcom.2019.05.020

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	Real time monitoring technology for full aperture grating diffraction wavefront with high frequency error
	C.Yang; H.L.Yu; X.T.Li
	2019
发表期刊	Optics Communications
ISSN	0030-4018
卷号	452 页码:428-433
摘要	To improve the grating ruling efficiency and success rate, this report documents a method to indirectly measure the error trajectory of space coordinates produced by ruling and indexing systems. The errors were corrected based on the proposed active control system. According to the residual errors after correction, a mathematical model of the full aperture grating diffraction wavefront with high frequency error information was reconstructed in real time. Based on this mathematical model, two gratings were ruled with or without the aid of an error correction system, respectively, and the reconstructed grating diffraction wavefront values were obtained to verify the effectiveness of this method. For larger gratings, the grating diffraction wavefront can also be reconstructed in real time with long time ruling. The experimental result demonstrated that the grating quality can be judged by monitoring the grating diffraction wavefront in real time.
关键词	Optics
DOI	10.1016/j.optcom.2019.05.020
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62893
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	C.Yang,H.L.Yu,X.T.Li. Real time monitoring technology for full aperture grating diffraction wavefront with high frequency error[J]. Optics Communications,2019,452:428-433.
APA	C.Yang,H.L.Yu,&X.T.Li.(2019).Real time monitoring technology for full aperture grating diffraction wavefront with high frequency error.Optics Communications,452,428-433.
MLA	C.Yang,et al."Real time monitoring technology for full aperture grating diffraction wavefront with high frequency error".Optics Communications 452(2019):428-433.

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