The research about servo control of 6-DOF workbench based on vacuum environment

CIOMP OpenIR

	The research about servo control of 6-DOF workbench based on vacuum environment
	H.Z.Yu; Y.Y.Sun; G.Wang; W.J.Chang; L.X.Zhao; Z.Y.Ma
	2019
发表期刊	Basic & Clinical Pharmacology & Toxicology
ISSN	1742-7835
卷号	125 页码:20-20
关键词	Vacuum environment,Servo control,Workbench,Six degrees of freedom,Pharmacology & Pharmacy,Toxicology
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62854
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H.Z.Yu,Y.Y.Sun,G.Wang,et al. The research about servo control of 6-DOF workbench based on vacuum environment[J]. Basic & Clinical Pharmacology & Toxicology,2019,125:20-20.
APA	H.Z.Yu,Y.Y.Sun,G.Wang,W.J.Chang,L.X.Zhao,&Z.Y.Ma.(2019).The research about servo control of 6-DOF workbench based on vacuum environment.Basic & Clinical Pharmacology & Toxicology,125,20-20.
MLA	H.Z.Yu,et al."The research about servo control of 6-DOF workbench based on vacuum environment".Basic & Clinical Pharmacology & Toxicology 125(2019):20-20.