Surface shape measurement of large flat mirrors using a scanning pentaprism method

doi:10.3788/CO.20191204.0920

CIOMP OpenIR

	Surface shape measurement of large flat mirrors using a scanning pentaprism method
	L.Yuan; X.-H.Zhang
	2019
发表期刊	Chinese Optics
ISSN	20951531
卷号	12 期号:4 页码:920-931
摘要	To improve the accuracy and efficiency of the surface shape measurements of large flat mirrors, a new scanning pentaprism method is proposed. In this method, we use a scanning pentaprism and an autocollimator to radially scan and measure the differences between the tilt angles. The surface shape of the flat mirror under test is expressed by a linear combination of Zernike polynomials and an equation set is established on the basis of the angle differences. Finally, the surface shape of the flat mirror can be derived through a least squares calculation. In the measuring process, this method can automatically accommodate changes in the pentaprism tilts during scans, which can reduce measurement errors. The error analysis indicates that the surface shape measurement accuracy by this method is 7.6 nm rms(root-mean-square). This method is used to measure the surface shape of a 1.5 m flat mirror and the result is compared to that of the Ritchey-Common method. The difference between the two surface shape results is 7.1 nm rms, which is less than the surface shape measurement results of the scanning pentaprism method. This proves that it is feasible using the scanning pentaprism method to measure the topographies of large flat mirrors. 2019, China Science Publishing & Media LTD. All right reserved.
关键词	Optical testing,Mirrors,Prisms,Scanning
DOI	10.3788/CO.20191204.0920
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收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62835
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L.Yuan,X.-H.Zhang. Surface shape measurement of large flat mirrors using a scanning pentaprism method[J]. Chinese Optics,2019,12(4):920-931.
APA	L.Yuan,&X.-H.Zhang.(2019).Surface shape measurement of large flat mirrors using a scanning pentaprism method.Chinese Optics,12(4),920-931.
MLA	L.Yuan,et al."Surface shape measurement of large flat mirrors using a scanning pentaprism method".Chinese Optics 12.4(2019):920-931.

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