Misalignment correction for free-form surface in non-null interferometric testing

doi:10.1016/j.optcom.2018.12.023

CIOMP OpenIR

	Misalignment correction for free-form surface in non-null interferometric testing
	Z.M.Zang; D.Liu; J.Bai; Y.H.Zhou; T.L.Yan; S.J.Chen; Y.Wang
	2019
发表期刊	Optics Communications
ISSN	0030-4018
卷号	437 页码:204-213
摘要	Unlike rotational symmetric surfaces, free-form surfaces have sophisticated degrees of freedom, therefore, are more difficult to be aligned. In this work, a practical and accurate correction method is proposed for the misalignment removal of the free-form surface in a non-null interferometric testing system based on computer modeling. The misalignment aberrations, introduced by axial location error, rotation error and non-axial attitude error, are modeled and corrected step by step. The axial and non-axial positions of the free-form surface in the computer model are adjusted from the ideal position to the misaligned one, matching the actual positions in experiment for the correction. Since the modeled position are tuned to be consistent with the actual one, all the misalignment aberrations can be removed from the test wavefront with the reconstruction algorithm. Computer simulations are displayed to verify the accuracy of the proposed method. Experimental results after alignment show basic consistency with the results of Taylor Hobson Profilometer, in which the peak-to-valley (PV) value error of the profile line is better than 1/30 lambda.
关键词	Free-form surface,Surface measurement,Figure,Interferometry,3-dimensional shape measurement,calibration,system,Optics
DOI	10.1016/j.optcom.2018.12.023
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62834
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Z.M.Zang,D.Liu,J.Bai,et al. Misalignment correction for free-form surface in non-null interferometric testing[J]. Optics Communications,2019,437:204-213.
APA	Z.M.Zang.,D.Liu.,J.Bai.,Y.H.Zhou.,T.L.Yan.,...&Y.Wang.(2019).Misalignment correction for free-form surface in non-null interferometric testing.Optics Communications,437,204-213.
MLA	Z.M.Zang,et al."Misalignment correction for free-form surface in non-null interferometric testing".Optics Communications 437(2019):204-213.

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