Error separation methods based on absolute testing of non-uniform sampling

doi:10.1016/j.ijleo.2018.08.017

CIOMP OpenIR

	Error separation methods based on absolute testing of non-uniform sampling
	L.Zhang; Y.Xiang
	2019
发表期刊	Optik
ISSN	0030-4026
卷号	178 页码:986-991
摘要	Grating lateral shearing interferometry is one of important technique to test the system wavefront aberration from lithographic lens. In order to achieve the calibration in ultra-high-precision, we must eliminate the system errors from the grating lateral shearing interferometer. Therefore, a three-step average algorithm and a weighed-three-step average algorithm are proposed to remove the rotationally asymmetric system errors from our shearing setup. The research results show that the RMS of the accuracy of three-step average algorithm centered on 45 degrees can approach 0.71 nm, and the RMS of the accuracy of its weighed algorithm can approach 0.54 nm.
关键词	Absolute calibration,Grating lateral shearing interferometer,Systemerrors,Rotation algorithm,interferometer,metrology,Optics
DOI	10.1016/j.ijleo.2018.08.017
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62801
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L.Zhang,Y.Xiang. Error separation methods based on absolute testing of non-uniform sampling[J]. Optik,2019,178:986-991.
APA	L.Zhang,&Y.Xiang.(2019).Error separation methods based on absolute testing of non-uniform sampling.Optik,178,986-991.
MLA	L.Zhang,et al."Error separation methods based on absolute testing of non-uniform sampling".Optik 178(2019):986-991.

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