Error analysis and fabrication of low-stepped mirrors

doi:10.3788/CO.20191204.0791

CIOMP OpenIR

	Error analysis and fabrication of low-stepped mirrors
	M.Zhang; J.-G.Lv; J.-Q.Liang; Z.-Z.Liang; Y.-X.Qin; W.-B.Wang
	2019
发表期刊	Chinese Optics
ISSN	20951531
卷号	12 期号:4 页码:791-803
摘要	In this study, a static and light Fourier transform infrared spectrometer based on stepped mirrors and a grid beam splitter was proposed. By introducing two stepped mirrors into the interference system, the optical path difference is discretized and the 2-dimensional sampling of the interferogram is obtained. Furthermore, by introducing the grid beam splitter into the interference system, the volume and weight are decreased. Stepped mirrors as the core optical devices of such a spectrometer, its step height consistency, face flatness and the structure's precision determine the spectral sampling interval, resolution and noise of the system. We propose a method based on MOEMS technology involving multiple depositions accompanied by a 50% reduction in thickness at every iteration to fabricate a low-stepped mirror with 32 steps and 0.625 m in step height. The test results show that the root-mean-square of roughness is 1.72 nm and that the average height of the real steps is 626.9 nm. The effect of the height error on the recovered spectrum is analyzed. In order to reduce the influence of this error, two methods are proposed:one is through using tooling factor to reduce the monitoring error of the film thickness, thus reducing the height error; the other is through using the least-squares approximation cosine polynomial algorithm to correct the recovered spectrum. The spectrum-constructing error(SCE) is reduced to 2.34%, which meets the requirements of spectral restoration. Finally, the experiment was carried out using low stepped mirrors and the interferograms were obtained before and after the addition of the sample. The absorption spectrum of the sample acetonitrile can be obtained using a Fourier transform. 2019, China Science Publishing & Media LTD. All right reserved.
关键词	Mirrors,Absorption spectroscopy,Approximation algorithms,Error analysis,Fabrication,Fourier transform infrared spectroscopy,Fourier transforms,Infrared spectrometers,Interferometry,Iterative methods,Least squares approximations,Polynomial approximation,Prisms,Spectrum analysis
DOI	10.3788/CO.20191204.0791
URL	查看原文
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62795
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M.Zhang,J.-G.Lv,J.-Q.Liang,et al. Error analysis and fabrication of low-stepped mirrors[J]. Chinese Optics,2019,12(4):791-803.
APA	M.Zhang,J.-G.Lv,J.-Q.Liang,Z.-Z.Liang,Y.-X.Qin,&W.-B.Wang.(2019).Error analysis and fabrication of low-stepped mirrors.Chinese Optics,12(4),791-803.
MLA	M.Zhang,et al."Error analysis and fabrication of low-stepped mirrors".Chinese Optics 12.4(2019):791-803.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Error analysis and f（659KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载